HORIBA Auto SE Ellipsometric spectrometer
Product Introduction of HORIBA Auto SE Ellipsometric Spectrometer:
HORIBA Auto SE Ellipsometric spectrometerIt is a new type of thin film measurement tool. With just a few simple buttons, sample measurement and analysis can be automatically completed within seconds, and a complete film property analysis report can be provided, including film thickness, optical constants, surface roughness, and film inhomogeneity, reflectance or transmittance. It is a solution for rapid thin-film measurement and device quality control. Designed specifically for thin film measurement, one-click operation ensures high efficiency.
Product features of HORIBA Auto SE Ellipsometric Spectrometer:
Available at450nm~1000nmRapid measurement within the wavelength range< 1Seconds
Multiple software options for spot size
Automatic loading and adjustment of sample height (automatic platform required)
Large-area automatic imaging (requires an automatic platform)
Temperature control console, liquid sample cell, electrochemical reaction cell
A variety of accessories such as sealed gas cells and permeability curve measurement
Product advantages of HORIBA Auto SE Ellipsometric Spectrometer:
Light spot visualization system:HORIBA Auto SE Ellipsometric spectrometer"PossessingMyAutoViewThe spot visualization system enables clear observation of smooth or rough sample surfaces, ensuring that users can accurately position the measurement spot at the measurement position on the sample target.
Large sample imaging options:HORIBA Auto SE Ellipsometric spectrometerEquipped with an automatic platform, it is convenient to locate the position of the microstructure on the measurement sample, and it can be used for uneven large sample piecesmappingImaging.
Intelligent diagnosis:HORIBA Auto SE The maintenance of the ellipsometry spectrometer is very simple. With the help of a complete operation wizard, it can automatically detect and diagnose problems and handle faults
Measurement principle of HORIBA Auto SE Ellipsometric Spectrometer product:
HORIBA Auto SE EllipsometerIt is a non-contact measurement method for film thickness measurement that utilizes the optical properties of thin films. The thickness and refractive index of the film are measured based on the state changes of polarized light during reflection or transmission. When polarized light shines on the surface of a film, the polarization state of the reflected or transmitted light will change. This change depends on the thickness of the film, its refractive index, as well as the polarization state and Angle of the incident light. By analyzing these changes, the thickness of the film can be accurately deduced.
HORIBA Auto SE Ellipsometric Spectrometer software:
HORIBA Auto SE Ellipsometric spectrometer softwareDeltaPsi2Powerful in function, it is based onWindowsTThe operating system has been fully utilizedHORIBA Scientific(JobinYvonThe advantages of the hardware technology of the ellipsometer (spectral technology) include numerous modeling and fitting processing functions, as well as a simple operation interface, which can provide researchers with convenient ellipsometer analysis methods.
Gradient film layer
Roughness or interface
Material composition/Crystallinity
Anisotropic film layer
The non-uniformity of film thickness
Deskewness factor
A complete property database related to material model formulas
Automatic correction of background light for thick transparent sample substrates
Periodic variation structure
For users' ultra-thin film applicationsBLMCAlgorithm
Multiple guesses, multiple initial values, multiple models, correlations...
Common applications of HORIBA Auto SE Ellipsometric spectrometer:
Interface characteristics | Surface measurement | Optical properties | Thickness measurement |
Amorphous silicon, polycrystalline silicon | Roughness | Optical constantn,k) | From Jae to15um |
Nano-crystalline silicon | Natural oxide thickness | Optical band gapEg | Single-layer and multi-layer films |
Transparent conductive oxide | Surface film thickness | Transmittance |
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Anti-reflection coating | Depolarization coefficient |
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Semiconductor | Flat panel display | Functional coatings | Biological and Chemical Engineering |
Dielectric film | TFT | Optical coating | Organic film |
Metal film | OLED | Anti-reflection type, self-cleaning type | Thin-film adsorption |
Polymers, photoresists | Plasma display panel | Surface coating and treatment | Surface function treatment |
PZTmembrane | Flexible display board | Organic materials |
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Product parameters of HORIBA Auto SE Ellipsometric Spectrometer:
Spot size | 500μmX500μm,250μmX250μm, 100μmX100μm,250μmX500μm, 70μmX250μm*,50μmX60μm*, 25μmX60μm* |
Test time | 5s,Max1s | Visual system | MyAutoView |
Psi,Delta Test accuracy | Ψ= 45 ° + / - 0.05 ° - Δ = 0 ° + / - 0.2 ° | Refractive index repeatability | N + / - 0.001 sigma (1) |
Thickness repeatability | dPlus or minus0.1 Aor0.01% (1sigma) | Sample stage size | 200mm-200mm |
Measurement diagram of HORIBA Auto SE ellipsometric spectrometer:
